Tantalum nitride thin film resistors by low temperature reactive sputtering for plastic electronics
نویسندگان
چکیده
منابع مشابه
Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
Piezoelectric aluminum nitride thin films were deposited on aluminum-molybdenum (AlMo) metallic nanocomposites using reactive DC sputtering at room temperature. The effect of sputtering parameters on film properties was assessed. A comparative study between AlN grown on AlMo and pure aluminum showed an equivalent (002) crystallographic texture. The piezoelectric coefficients were measured to be...
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ژورنال
عنوان ژورنال: Surface and Interface Analysis
سال: 2008
ISSN: 0142-2421,1096-9918
DOI: 10.1002/sia.2681